Major Facilities
1. Micro System Analyze (MSA), includes the following functions:
a) Single-Point Laser Vibrometry measures out-of-plane displacement (in picometers resolution), velocity, and acceleration, up to 30MHz.
b) Roster Scanning Laser Vibrometry provides deformed shapes of the measured surface through the entire spectrum; It is powerful tool to verify FEM modal analysis.
c) Strobe Microscope can be used to measure in-planedisplacement (in nanometers resolution), velocity, and acceleration up to 2MHz.
d) White light surface profiler is used to measure surface topography or roughness.
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| A spring with thickness of 20um | A thin film of 100 nm |
For more information or looking for MSA testing, please contact Dr. Lai by email lai@me.queensu.ca or by phone: 1-613-533-6535 or 1-613-533-2583.
2. Probe Station and peripherals
This is a MEMS testing platform around a probe station, which can do a variety typical MEMS testing from wafer level to packaged chips.
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To be updated.