What is MEMS?
Micro Electro-Mechanical Systems (MEMS) is one of the most rapid developing research fields all over the world [1].
Starting from pure academic research field [2], MEMS gradually incorporates its mature technology in industry [3]. Recently, the frontier areas of MEMS research have gradually moved into Bio-MEMS and NEMS (Nano-Electro-Mechanical Systems). MEMS/NEMS attracts researchers from a variety of disciplines including mechanical engineering (mechanics, heat transfer, fluidics, etc.), electrical engineering (electronics, IC, etc.), materials engineering, biomedical engineering and basic science such as physics, chemistry and biology.
MEMS Projects
- Integration of microsensors with microactuators
- Development of pressure sensors
- Multi-mass microgyroscopes
BioMEMS Projects
- Micropumps
- Microbiosensors
- Mechanical Tissue Stimulators